Ultra-Thin Silicon based Piezoelectric Capacitive Tactile Sensor
نویسندگان
چکیده
منابع مشابه
23.3: Tactile Sensor Based on Piezoelectric Resonance
We discuss here about the realization of tactile sensor based on the principle of change in piezoelectric resonance frequency with the applied pressure. An array of electrodes has been adopted on either side of the PZT material to have independent resonators. The common areas sandwiched between the electrodes and excitable at resonance frequency of the PZT material are used to form the sensitiv...
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2016
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2016.11.242